
Canon Optron started the research and development of fluorite of large diameters and super high quality in 1995, intended for use in aligners for integrated circuit manufacturing. In 2000, it has begun supplying materials for lenses. Then Canon Optron has continued its efforts to develop further high quality products, succeeding in implementing the world's top-level technology for manufacturing high quality fluorite.
Largest manufacturable crystal size:
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400mm (diameter) x 100mm (thickness) |
Internal transmittance;
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99.9%/cm or higher (@ 193nm) |
Transmittance degradation after laser radiation:
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0.1%/cm or less (after laser radiation of 30mJ/cm2 ArF) |
Birefringence (average value +
2σ):
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0.5nm/cm or less (@ 193nm, inside the 300mm diameter area) |
Refractive index homogeneity (residual after 36 Zernike terms):
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0.014ppm |
Click the links below to see a telescope that uses a large diameter fluorite crystal lens.
A large diameter fluorite lens for astronomical telescopes at astronomical observatories
Yuki Information + Communication Center
Unzen Suwanoike Visitor Center
Sakura Lake Nature Watching Station
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